JPH0360363B2 - - Google Patents

Info

Publication number
JPH0360363B2
JPH0360363B2 JP16866884A JP16866884A JPH0360363B2 JP H0360363 B2 JPH0360363 B2 JP H0360363B2 JP 16866884 A JP16866884 A JP 16866884A JP 16866884 A JP16866884 A JP 16866884A JP H0360363 B2 JPH0360363 B2 JP H0360363B2
Authority
JP
Japan
Prior art keywords
stylus
force
piezoelectric element
piezoelectric elements
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16866884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145902A (ja
Inventor
Minoru Fukuyoshi
Takashi Koto
Tetsuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP16866884A priority Critical patent/JPS6145902A/ja
Publication of JPS6145902A publication Critical patent/JPS6145902A/ja
Publication of JPH0360363B2 publication Critical patent/JPH0360363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP16866884A 1984-08-10 1984-08-10 タツチ信号プロ−ブ Granted JPS6145902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16866884A JPS6145902A (ja) 1984-08-10 1984-08-10 タツチ信号プロ−ブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16866884A JPS6145902A (ja) 1984-08-10 1984-08-10 タツチ信号プロ−ブ

Publications (2)

Publication Number Publication Date
JPS6145902A JPS6145902A (ja) 1986-03-06
JPH0360363B2 true JPH0360363B2 (en]) 1991-09-13

Family

ID=15872282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16866884A Granted JPS6145902A (ja) 1984-08-10 1984-08-10 タツチ信号プロ−ブ

Country Status (1)

Country Link
JP (1) JPS6145902A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01103031A (ja) * 1987-10-16 1989-04-20 Canon Inc 信号伝送装置

Also Published As

Publication number Publication date
JPS6145902A (ja) 1986-03-06

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